Download e-book for iPad: Adhesion Aspects in MEMS/NEMS by Seong H. Kim, Michael T. Dugger, Kash L. Mittal

By Seong H. Kim, Michael T. Dugger, Kash L. Mittal

ISBN-10: 9004190953

ISBN-13: 9789004190955

Phenomena linked to the adhesion interplay of surfaces were a severe point of micro- and nanosystem improvement and function because the first MicroElectroMechanicalSystems(MEMS) have been fabricated. those phenomena are ubiquitous in nature and are found in all structures, notwithstanding MEMS units are quite delicate to their results due to their small measurement and constrained actuation strength which may be Read more...

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Adhesion Aspects in MEMS/NEMS (2010) 25–44 Even if the partial pressure of the vapor in the ambient is lower than its saturation pressure, a condensed phase can be formed in the narrow gap of two solid surfaces if the vapor molecule has a strong affinity toward the solid surface. 1). Alcohol vapors have been shown to be highly efficient to prevent MEMS failure compared to other coating based lubrication approaches [1–3], but are expected to form capillaries of the condensed liquid at the asperity contacts depending on the pressure of the vapor being adsorbed relative to its saturation vapor pressure (p/psat ).

Hence, it is critical to understand alcohol capillarity effects on the adhesion of nano-asperity silicon oxide surfaces. Atomic force microscopy (AFM) has been used to quantitatively measure the capillary forces exerted by the liquid meniscus at the nano- and micro-scales, directly related to MEMS and other applications [4–10]. Figure 1 shows the pull-off force for silicon oxide surfaces in various alcohol vapor environments measured with AFM tips mounted on low spring constant cantilevers [10].

Adhesion Aspects in MEMS/NEMS (2010) 25–44 29 2. 1, we show that the capillary pressure of the meniscus and the disjoining pressure of the adsorbed layer are equal if both are in thermodynamic equilibrium with the vapor. 3, we derive exact and approximate models for the effect of disjoining pressure on capillary force as a function of p/psat . The assumptions are that the sphere and substrate are elastically rigid, and that the disjoining layer forms a continuous film. The disjoining layer is the adsorbate film which is in equilibrium with the vapor and the capillary meniscus.

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Adhesion Aspects in MEMS/NEMS by Seong H. Kim, Michael T. Dugger, Kash L. Mittal

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